The mathematical model of nanocoating spraying in electric and magnetic fields

Abstract

The mathematical model of spraying in a magnetron sputtering system (MSS), which is based on laws of the moving of charged particles in intersecting electric and magnetic fields, is given. The spatial structure of ion current density distribution near the cathode was considered as well as dependence of this structure and target parameters. The possibility of minimizing the spraying non-uniformity by numerical experiments and the target optimal geometric parameters selection are shown. In particular, it was shown that at a certain target cone angle it is possible to reach theoretical minimum of the thickness non-uniformity of the nano-coating at given other parameters and this may be useful at the design of MSS.