The Dependence of Sample Thickness on Annular Bright Field Microscopy

Misty Latting, W. Walkosz, R. Klie
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Abstract

Annular Bright Field (ABF) is a relatively new method of Scanning Transmission Electron Microscopy (STEM) imaging that is desirable because of its ability to provide additional visual information in terms of showing lightweight atoms, whereas standard dark field imaging does not. In order to better understand the parameters necessary to perfect this method, this research article aimed to study a specific property of this imaging method: the dependence of sample thickness on image quality and atomic resolution. Multislice calculations were utilized to generate atomic potentials that were used to simulate different thicknesses of β-Si 3 N 4 . The resulting images were then examined to measure atomic full width at half-maximum (FWHM) in order to have a quantifiable value to support visual selection of the best ABF output image. Comparison of image quality/atomic resolution and FWHM values suggested that as a general trend, as sample thickness increases, atomic resolution and image quality deteriorate, citing Huygens' Principle of Classical Optics via the propagation of spherical electron waves through a vacuum. This study will bring a new awareness to the necessary precision required by researchers' sample preparation during Annular Bright Field imaging to yield the best image of their respective samples.
样品厚度对环形亮场显微镜的依赖性
环形亮场(ABF)是扫描透射电子显微镜(STEM)成像的一种相对较新的方法,它是可取的,因为它能够在显示轻原子方面提供额外的视觉信息,而标准的暗场成像则没有。为了更好地了解完善该方法所需的参数,本文旨在研究该成像方法的一个具体特性:样品厚度对图像质量和原子分辨率的依赖性。利用多层计算得到了模拟不同厚度β- si3n4的原子势。然后检查所得图像以测量半最大原子全宽(FWHM),以便有一个可量化的值,以支持最佳ABF输出图像的视觉选择。根据经典光学惠更斯原理,通过球形电子波在真空中的传播,图像质量/原子分辨率和FWHM值的比较表明,随着样品厚度的增加,原子分辨率和图像质量一般会下降。该研究将使研究人员对在环形亮场成像过程中样品制备所需的精度有了新的认识,以获得各自样品的最佳图像。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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