Study of a cantilevered actuator driven by magnetostriction in low magnetic field

Abstract

A cantilevered actuator is fabricated in this study by sputter deposition using amorphous Fe72Si14B14 as the magnetostrictive material. The displacement of the cantilever is observed with applying the magnetic field of 10 kA/m to the width direction of the cantilever. Results show that the displacement of the cantilever increased with decreasing substrate thickness, and has a peak value at the thickness of the magnetic thin film of 0.5 mum when the substrate thickness is 7.5 mum.