Plasma Production Using An Asmussen Cavity In A Magnetic Field

S. D. De Souza-Machado, J. Curry, F. Skiff
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Abstract

The density, temperature and flow speed of an argon plasma produced by an Asmussen cavity in a weak magnetic field is measured using Laser Induced Fluorescence and Langmuir probes. The sour is at one end of a main chamber that is in a magnetic mirror configuration, with pancake coils arranged at both the source end and the far end. The magnetic field at the source is below that required for ECR. The 2.45 GHz microwave resonant cavity has a diameter of 10.2 cm, with a 1.8 cm O.D. (1.35 cm I.D.) on-axis quartz tube within which the plasma is created, both of which are smaller than many of the Asmussen cavities described in the current literature.
磁场中使用阿斯穆森腔产生等离子体
用激光诱导荧光和朗缪尔探针测量了弱磁场下阿斯穆森腔产生的氩等离子体的密度、温度和流速。酸在主腔室的一端,主腔室呈磁镜结构,源端和远端都有煎饼线圈。源处的磁场低于ECR所需的磁场。2.45 GHz微波谐振腔的直径为10.2厘米,有一个1.8厘米外径(1.35厘米内径)的石英管,等离子体在其中产生,两者都比目前文献中描述的许多Asmussen腔要小。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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