Application of Lagrangian configuration to the analysis of electrostatically-driven MEMS resonators

Abstract

This paper proposes an example of application of Lagrange configuration to the modelling of the electrostatically- driven vibrations of a silicon bar in flexure modes. Mapping an acousto-elastic problem onto the material coordinates of a well-known reference configuration is appropriate to analyze problems in finite deformation and is an excellent tool to model electrostatically-driven MEMS resonators. The paper presents an application of this approach to the analysis of a flexural resonator.