Piezoelectric acoustic resonant mass sensors

Abstract

Piezoelectric acoustic resonant sensors enable selective and label-free detection of biological events in real time. They are featured with self-actuating and self-detecting ability, and have been extensively explored in chemical and biological sensing applications. In this paper, four types of piezoelectric acoustic sensors operating at different resonant modes (i.e., thickness extensional mode, thickness shear mode, lateral extensional mode and flexural mode) are reviewed and discussed, with particular focus on the fundamental mechanisms and the recent biological sensing applications.