The electron-optical scheme of the energy analyzer of small-sized electron spectrometer

Abstract

The electron-optical scheme of the axially-symmetric electrostatic mirror-type energy analyzer of charged particles beam based on a multipole electrode system is proposed. The field of the energy analyzer is designed as a superposition of the base cylindrical field and set of circular octupole coaxial with base field. The trajectory analysis of the electron-optical system was carried out by a numerical method. Corpuscular-optical parameters of system are calculated. The “ring-ring” type third-order angular focusing scheme is found. The proposed energy analyzer has compactness and high corpuscular-optical parameters. The instrumental function of device is calculated.