Parametric Studies Of Electron-energy -distribution-function And Rate Constants For Plasma-etching Reactors

Abstract

The resulting reaction-rate coefficients are used to generate standard Arrhenius fits for the rate constants as a function of average electron energy. These reaction-rate coefficients are then employed in a plasma reactor model through a Chemkin interface. Results from the reactor model indicate the dependence of ion, electron, and neutral species concentrations on the assumptions inherent in the reactionrate determinations. We present differences between results