Simulation of spectroscopic ellipsometry for dielectric lamellar gratings

Abstract

Spectroscopic ellipsometry for lamellar gratings made of lossless dielectric materials is numerically investigated by using the rigorous coupled-wave formulation based on Li¿s Fourier factorization rules. Accurate values of the ellipsometric angles are obtained with small number of Fourier components, and it is shown that accurate estimation of the grating parameters is possible in reasonable computation time.