Z. Shaked, P. Hurwitz, A. Heiman, K. Moen, R. Kanawati, S. Chaudhry, M. Racanelli
{"title":"SOI technology for front end applications","authors":"Z. Shaked, P. Hurwitz, A. Heiman, K. Moen, R. Kanawati, S. Chaudhry, M. Racanelli","doi":"10.1109/COMCAS.2015.7360403","DOIUrl":null,"url":null,"abstract":"SOI processes have become the mainstream technology for wireless front end manufacturing following recent optimization of starting materials and fabrication processes. In this paper, we will describe such RFSOI platform for RF switches, the process optimizations and the devices offering required for efficient FEM design.","PeriodicalId":431569,"journal":{"name":"2015 IEEE International Conference on Microwaves, Communications, Antennas and Electronic Systems (COMCAS)","volume":"120 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2015-12-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"3","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2015 IEEE International Conference on Microwaves, Communications, Antennas and Electronic Systems (COMCAS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/COMCAS.2015.7360403","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 3
Abstract
SOI processes have become the mainstream technology for wireless front end manufacturing following recent optimization of starting materials and fabrication processes. In this paper, we will describe such RFSOI platform for RF switches, the process optimizations and the devices offering required for efficient FEM design.