Ellipsometry for Measurement of Complex Dielectric Permittivity in Millimeter-Wave Region

Abstract

The ellipsometry method is extended to a measurement for complex permittivities of materials in millimeter-wave region. We propose an effective technique based on the Fourier analysis method to eliminate an uncertainty due to the free-space method. Complex permittivities can be measured with a high degree of accuracy by the improved ellipsometry method, as named Fourier Analysis Correction Ellipsometry (FACE) Method.