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All-oxide crystalline microelectromechanical systems: Fabrication technique for strontium titanate micro-cantilevers

2009 9th IEEE Conference on Nanotechnology (IEEE-NANO) Pub Date : 2009-07-26 DOI:10.1016/J.PROCHE.2009.07.209
M. Biasotti, L. Pellegrino, E. Bellingeri, C. Bernini, A. Siri, D. Marré
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引用次数: 7
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2009 9th IEEE Conference on Nanotechnology (IEEE-NANO)
2009 9th IEEE Conference on Nanotechnology (IEEE-NANO)
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