Fabrication and Evaluation of the Flexible and Implantable Soft Micro Electrode for Retinal Prosthesis

Abstract

This paper presents a polydimethylsiloxane (PDMS)-based flexible and implantable micro electrode for the retinal prosthesis. The patterning of the electrode and the wires was performed through the photolithography and chemical etching process after e-beam deposition Ti and Au, and the thick electrode was fabricated through the electroplating process. We carried out in-vivo test for the evaluation of biocompatibility by implanting electrodes under the ICR mouse skin for 45 days. The electrode was implanted under the retina of rabbit's eye to investigate the feasibility as a retinal prosthesis