Temperature dependence of Pd thin film cryo resistors

Abstract

Cryo resistors based on Pd thin films were designed and investigated in temperature range 50 mK – 300 K. The resistors in the range 100 kΩ – 1.3 MΩ were fabricated using thermal evaporation technique. Minimum temperature coefficient, −0.4 (37)·10{−6}/K, in temperature range 50 mK – 100 mK has been obtained for 20 nm thin film 560 kΩ resistor. Binary and decimal configuration of connection of resistive elements were used for flexible adjustment of resistance value.