{"title":"MANIFEST metrology toolkit","authors":"M. Goodwin, S. E. Hong","doi":"10.1117/12.2539897","DOIUrl":null,"url":null,"abstract":"The MANIFEST Metrology Toolkit for GMT is set of in-house software tools to assist in the concept development and demonstration of the MANIFEST Metrology System. The Metrology Toolkit forms part of the ongoing MANIFEST pre- Concept Design Study conducted throughout 2019. The Metrology System is an essential component to provide precise location measurements of Starbugs over the focal-plane and relay this information to the positioning system. The goal of the Metrology System is to provide a positional measurement better than 30 microns (0.03 arcsecs) over a field-plate diameter of 1.2 m. The Metrology Toolkit is intended to be flexible to verify different implementations of the Metrology System.","PeriodicalId":131350,"journal":{"name":"Micro + Nano Materials, Devices, and Applications","volume":"9 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2020-01-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Micro + Nano Materials, Devices, and Applications","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.2539897","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
The MANIFEST Metrology Toolkit for GMT is set of in-house software tools to assist in the concept development and demonstration of the MANIFEST Metrology System. The Metrology Toolkit forms part of the ongoing MANIFEST pre- Concept Design Study conducted throughout 2019. The Metrology System is an essential component to provide precise location measurements of Starbugs over the focal-plane and relay this information to the positioning system. The goal of the Metrology System is to provide a positional measurement better than 30 microns (0.03 arcsecs) over a field-plate diameter of 1.2 m. The Metrology Toolkit is intended to be flexible to verify different implementations of the Metrology System.