Magnetic Properties of Lithographically Patterned Co/Pd Nanostructures Obtained by E-Beam and Ga Ion Irradiation

Abstract

In this report, patterning Co/Pd continuous magnetic film with perpendicular magnetic anisotropy without significant modifications of the surface roughness of the magnetic films using e-beam lithography followed by Ga ion irradiation has been investigated, as a new approach to realize a thermally stable magnetic storage. Their magnetic properties are also discussed in detail. For comparison, discretely patterned Co/Pd film obtained by e-beam lithography followed by etching process is also studied. From M-H loops, the sample shows in-plane anisotropy. Also, from magnetic force microscopy (MFM) image and M-H loops of ion-irradiation-patterned Co/Pd films, the exchange coupling between bits is considered to exist through in-plane magnetized space region.