Digital Micromirror Device™: Commercialization of a Massively Parallel MEMS Technology

Abstract

The Digital Micromirror Device™ (DMD™) is an optical, massively parallel microelectromechanical systems (MEMS) technology that has 500,000 to 1,300,000 rotating digital micromirrors monolithically formed over a CMOS address circuit. Each micromirror acts as a digital light switch. The DMD is the only MEMS light modulator technology to be commercialized in a projection display application. Because the DMD is digital and has numerous moving parts, the commercialization process has had its unique challenges and rewards. This paper introduces DMD technology and presents its R&D history and current focus. The quality, reliability, and manufacturing challenges of this important new display technology also are presented, along with the factors that led to the successful resolution of these challenges.