The Effect of Surface Errors on Optical Performance

J. Elson, H. E. Bennett
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Abstract

Surface irregularities range in lateral dimensions from those usually associated with optical figure error through values associated with zonal errors to those usually described as microroughness and extending to submicron dimensions. Typically, the irregularities are a small fraction of a wavelength in height so that physical, not geometrical, optics must be used to calculate their contribution to optical performance. The total integrated scatter (TIS) from irregularities is given by the expression (4πδ/λ)2, where λ is the wavelength and δ is the rms roughness of the surface. TIS is defined as the total reflectance of the surface minus the specular reflectance, i.e., the fraction of the total reflected light that is scattered into a hemisphere. The amount of scattered light is proportional to the mean square of the heights of the surface irregularities. No upper limiting value of lateral dimensions of the surface irregularities appears in this scalar theory, although, for normal incidence, the scattering becomes virtual when the lateral dimension ℓ of the irregularities becomes less than λ. The more closely spaced the irregularities are, the larger is the angle into which light is scattered. When ℓ ≈ λ, as is true for zonal irregularities, the scattered light is very close to the specular direction (typically a few minutes of arc), and, for still larger lateral dimensions such as are associated with figure errors, its main effect is to decrease the on-axis intensity of the focused beam. It follows that if near-angle scattering is of primary importance, as for example in a system projecting a light beam, the most important surfacing parameters may be zonal and figure errors. Large-angle scattering may also be important but becomes of particular concern for an imaging system such as a telescope where light may enter the optical system from large off-axis angles, strike the optical component, and be scattered into the focal plane. When large-angle scattering is important, the height of the more closely spaced irregularities beomes critical. A calculation of the effect of microirregularities having a range of autocovariance lengths on the performance of a typical mirror telescope will be given to demonstrate the possible degradation effects of both near- and large-angle scattering. Vignetting effects that occur when the mirror is illuminated at off-axis angles are also considered. (It should be pointed out that we are discussing scattering of light into the optical path by the optical components themselves. No arrangement of baffles will have any effect on this type of scattered intensity. Programs such as APART or GUERAP are designed to prevent light scattered from the mounting system from reaching the focal plane, not light scattered directly into the focal plane by the components themselves.)
表面误差对光学性能的影响
表面不规则性的横向尺寸范围从通常与光学图形误差相关的尺寸到与区域误差相关的值,再到通常被描述为微粗糙度并延伸到亚微米尺寸的尺寸。通常情况下,不规则性是波长高度的一小部分,因此必须使用物理光学而不是几何光学来计算它们对光学性能的贡献。不规则性的总积分散射(TIS)由表达式(4πδ/λ)2给出,其中λ为波长,δ为表面粗糙度的均方根。TIS定义为表面的总反射率减去镜面反射率,即散射到一个半球的总反射光的比例。散射光的数量与表面不规则性高度的均方成正比。在该标量理论中,表面不规则的横向维数不存在上限值,但对于正入射,当不规则的横向维数小于λ时,散射变为虚散射。不规则的间距越近,光散射的角度就越大。当r≈λ时,就像带状不规则一样,散射光非常接近镜面方向(通常是几分钟弧),并且,对于更大的横向尺寸,例如与图形误差相关的尺寸,其主要作用是降低聚焦光束的轴上强度。由此可见,如果近角度散射是最重要的,例如在一个投射光束的系统中,最重要的表面参数可能是区域和图形误差。大角度散射也可能很重要,但对于像望远镜这样的成像系统来说尤其重要,因为光可能从大的离轴角度进入光学系统,击中光学元件,并散射到焦平面上。当大角度散射很重要时,间距更近的不规则性的高度就变得至关重要。计算具有一定自协方差长度范围的微不规则对典型镜面望远镜性能的影响,以证明近角和大角散射可能产生的退化效应。当反射镜以离轴角度照射时发生的渐晕效应也被考虑在内。(应该指出的是,我们讨论的是光元件本身在光程中的散射。没有挡板的安排将对这种类型的散射强度有任何影响。诸如APART或GUERAP等程序旨在防止安装系统散射的光到达焦平面,而不是由组件本身直接散射到焦平面的光。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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