Electrostatic energy characterization for an atomic force microscope probe

Abstract

An accurate model for the total electrostatic energy associated with an atomic force microscope probe (AFM) has been developed. Unlike other models, the model takes account of the electrostatic energy associated with the fringing field capacitances between the AFM probe cantilever and the substrate to result in a more accurate energy expression. The model then used to develop a closed-form model for the electrostatic collapse voltage between the probe and the substrate. Excellent agreement between the model determined collapse voltage and the previously published experimental results validates the accuracy of the model.