The research on optical free-form metrology technologies

Abstract

With the rapid development of national defense, aerospace and other fields, the demand for high precision and high quality photoelectric products is increasing day by day, and these photoelectric products are gradually developing toward miniaturization. If the optical elements use a free-form, the imaging quality of the optical imaging system can be greatly improved, and the illumination uniformity of the optical illumination system and the transmission efficiency of the information transmission system can also be remarkably improved. With free-form optics becoming the leading representative technology of advanced optical engineering, optical metrology technologies for free-form optics has become the hotspot research of current science-technology development. In this paper, the development of optical metrology technologies, the present situation and the advantages and disadvantages of various metrology technologies are described in detail, which will be of guiding significance for future research on optical metrology technologies for free-form optics.