A new ESD self-protection structure for 700V high side gate drive IC

Abstract

A new concept to realize self-protected ESD structure for 700V high side gate drive IC without additional process steps and area penalty is presented. The device was verified by simulation and confirmed by experimental results. A parasitic NPN structure integrated in high voltage level shifter LDMOS enables LDMOS to be operated within safe operating area when ESD strikes the high side driver part with respect to the low voltage controller by triggering snapback right after breakdown. The new ESD self-protected LDMOS and high voltage junction termination structure in conjunction with parasitic NPN showed remarkable improvement in HBM ESD level from 1.4kV to 6.8kV.