Automatic tuning of PI controller for atomic force microscope based on relay with hysteresis

Xianwei Zhou, Xiaokun Dong, Yudong Zhang, Yongchun Fang
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引用次数: 12

Abstract

An atomic force microscope (AFM) usually employs proportional-integral (PI) control strategy to sustain a constant cantilever deflection. However, it is well known that the tuning of PI parameters is a tedious and complicated procedure, especially for those unfamiliar with control theory. In this paper, we employ and implement relay controller to automate the tuning procedure for contact-mode AFM PI controller during different scanning speed operations based on relay with hysteresis. Experimental results show that this approach offers system with satisfactory step response with typical settling time of about 2 ms. Moreover, better sample topography image can be obtained after auto-tuning the control gains during different scanning speed.
基于磁滞继电器的原子力显微镜PI控制器自动整定
原子力显微镜(AFM)通常采用比例积分(PI)控制策略来维持恒定的悬臂挠度。然而,众所周知,PI参数的整定是一个繁琐而复杂的过程,特别是对于那些不熟悉控制理论的人来说。在本文中,我们采用并实现了继电器控制器,在具有滞后的继电器的基础上,实现了接触模式AFM PI控制器在不同扫描速度下的自动调谐过程。实验结果表明,该方法具有满意的阶跃响应,典型的稳定时间约为2ms。通过对不同扫描速度下的控制增益进行自动调整,可以获得较好的样品形貌图像。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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