A study of new flip chip packaging process for diversified bump and land combination

H. Noro, S. Ito, M. Kuwamura, M. Mizutani
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Abstract

Flip chip packaging using plastic substrates is gaining popularity in the IC packaging market. However, the process has not been standardized as a real mass production system. We have newly developed a flip chip packaging technology using a nonconductive underfill resin sheet. The process flow of the new flip chip packaging is as follows. First, the underfill sheet is laminated to the substrate. Next, the bumped die is aligned and attached to the substrate, which is covered with the underfill sheet under appropriate heat and pressure conditions. The bumps under the die penetrate by displacing resin and eventually reach the metal land of the substrate. Finally, curing of the underfill sheet and metal connections is done. We have studied the possibility of application of this packaging technology to diversified bump and land combinations with changing underfill components and process parameters. The electrical stability under several stress test conditions such as JEDEC Level-3 and TST has been evaluated in this study. After this evaluation, we found that the packages which were built with the appropriate resin components and process parameters show good performance for all of these reliability tests, almost regardless of bump and land materials.
多元碰撞与土地组合倒装晶片封装新工艺研究
使用塑料基板的倒装芯片封装在IC封装市场中越来越受欢迎。然而,这个过程还没有被标准化为一个真正的大规模生产系统。我们最近开发了一种使用不导电底填充树脂片的倒装芯片封装技术。新型倒装芯片封装的工艺流程如下:首先,将底填片层压到基材上。接下来,凸起的模具对准并附着在基材上,基材在适当的热量和压力条件下被下填片覆盖。模具下的凸起通过置换树脂渗透,最终到达基材的金属表面。最后,进行底填板和金属连接件的养护。我们研究了这种封装技术在改变下填料成分和工艺参数的情况下应用于多种凹凸组合的可能性。在JEDEC 3级和TST等几种应力测试条件下,对其电稳定性进行了评价。经过评估,我们发现使用合适的树脂成分和工艺参数构建的封装在所有这些可靠性测试中都表现出良好的性能,几乎与碰撞和地面材料无关。
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