Applications of MEMS in Robotics and BioMEMS

Abstract

The adoption rate for unmanned systems continues to increase in the military, defense, aerospace and robotics industries, and is now also being embraced in many new markets across a variety of applications. The benefits of autonomous mobility, improved safety, remote operation, remote data collection, and improved repeatability are just a few of the reasons why the field of unmanned systems is poised for growth. After the VLSI technology now days Micro Electro Mechanical System is the most upcoming technology. This paper gives the introduction to the MEMS devices, the applications of MEMS and NEMS in robotics and also in biomedical like Bio-MEMS like lab on chip.