Role Of Ion-implantation Induced Damage And Surface States In The Response Of Gallium Arsenide Picosecond Photoconductive Switches

D.D. Smith, J. Knudsen, R. Bowman, S. Moss, M. H. Herman
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Abstract

We have measured the temporal response and the photocurrent-voltage characteristics of picosecond photoconductive switches fabricated on microelectronic grade GaAs. Ion-implantation induced amorphization has been used to modify the linearityof responseof theseoptoelectronic switches.The nature of the induced defects were probed by using Raman Spectroscopy and electron-beam induced electroreflectance measurements. The linearity of response is critically dependent upon the natureof the semiconductor region under the metallic contacts. The role of surface-pinned states in the response and longer lived intermediate states is examined.
离子注入诱导损伤和表面态在砷化镓皮秒光导开关响应中的作用
我们测量了在微电子级砷化镓上制作的皮秒光导开关的时间响应和光电流电压特性。离子注入诱导的非晶化已被用于改变这些光电开关的线性响应。利用拉曼光谱和电子束诱导电反射测量对诱导缺陷的性质进行了探讨。响应的线性很大程度上取决于金属触点下半导体区域的性质。研究了表面固定态在响应和长寿命中间态中的作用。
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