A new measuring method for circular motion accuracy of NC machine tools based on dual-frequency laser interferometer

2011 IEEE International Symposium on Assembly and Manufacturing (ISAM) Pub Date : 2011-05-25 DOI:10.1109/ISAM.2011.5942301

Shanzhi Tang, Zhao Wang, Z. Jiang, Jianmin Gao, Junjie Guo

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引用次数: 7

Abstract

A new two-dimensional displacement measurement method to test circular track errors of NC machine tools is proposed, which is based on a dual-frequency laser interferometer. The system resolution can be up to tens of nanometer. This measurement system can inspect the circular track with small radius. And it requires two independent laser interferometers essentially can be simplified to only one laser source now. The measurement system absorbed the optical structure of Michelson interferometer. Reflecting arm end is plane reflecting mirrors and other arm end is corner reflector. The light way realizes 4 times subdivision, which can improve the measuring resolution. The optical setting consists of laser measuring head, 50% beam splitter, two measurement modules, two plane reflecting mirrors, etc. A beam of laser light from the measuring head, is equally split into two beams to measure displacements of X-direction and Y-direction. Under conditions of various feed speeds and radiuses, experiment results show that suggested method is feasible and effective for circular tests of NC machine tools. Its uncertainty of measurement is micron. Moreover, the system structure is simple and easy operation.

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基于双频激光干涉仪的数控机床圆周运动精度测量新方法

提出了一种基于双频激光干涉仪的数控机床圆轨迹误差二维位移测量新方法。系统分辨率可达几十纳米。该测量系统可以对小半径的圆形轨道进行检测。它需要两个独立的激光干涉仪，现在基本上可以简化为只有一个激光源。该测量系统吸收了迈克尔逊干涉仪的光学结构。反射臂一端为平面反射镜，另一端为角反射镜。光路实现了4次细分，提高了测量分辨率。光学装置由激光测量头、50%分束器、两个测量模块、两个平面反射镜等组成。从测量头发出的一束激光被均匀地分成两束来测量x方向和y方向的位移。实验结果表明，在不同进给速度和进给半径条件下，该方法对数控机床的圆弧测试是可行和有效的。其测量不确定度为微米级。此外，系统结构简单，易于操作。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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2011 IEEE International Symposium on Assembly and Manufacturing (ISAM)

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