{"title":"Reducing Production Cost of “Big MEMS” Chip Technologies Using Large Area Manufacturing Techniques","authors":"R. G. Andosca, Advanced Energy Industries","doi":"10.14332/svc19.proc.0003","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":220126,"journal":{"name":"Annual Technical Conference Proceedings","volume":"24 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2019-09-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Annual Technical Conference Proceedings","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.14332/svc19.proc.0003","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
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