Electrostatically transduced face-shear mode silicon MEMS microresonator

Abstract

Silicon microresonators are increasingly viewed as attractive candidates for a variety of frequency selective signal processing applications due to miniaturization and potential for integration with CMOS. In this work, we present a new electrostatically transduced face-shear (FS) mode square plate single crystal silicon resonator that rivals previously reported bulk mode resonator topologies and demonstrates good frequency scaling. A microfabricated face-shear mode resonator with 800 µm side length demonstrates a resonant frequency of 3.638 MHz, Q of 11193 in air and 836283 in vacuum as well as a TCF of −19ppm/K.