DFM for the next generation [semiconductor manufacturing]

Abstract

Many existing layout, modeling, and simulation tools can be thought of as components of a de facto system of design for semiconductor manufacturing (DFSM). This paper briefly reviews the increase in complexity of semiconductor devices, the spectrum of relevant semiconductor design tools, and the widening gap between future manufacturing needs and projected design capabilities. We also examine the emergence of design for manufacture (DFM) as a production philosophy in other industries and consider the lessons that might be learned for DFSM. The implications are that there is a need for accelerated improvements if historical semiconductor productivity growth is to be sustained. The existing work in DFSM has shown promise, but much more needs to be done. Advances in the development of component design tools are lagging and integration of these tools into a coherent system for DFSM is largely lacking. Suggestions for future development efforts of DFSM tools are offered.