Tri-layer, vertical Y-junction, Si3N4/SiO2 3D photonic integrated circuits with arbitrary splitting ratio

Abstract

We design Si3N4 tri-layer vertical Y-junction with arbitrary splitting ratio and low reflection, fabricate bi-layer asymmetric vertical coupler, and demonstrate tri-layer vertical Y-junction with splitting ratio of 1:1 and 3:2 for multilayer photonic integrated circuits.