Closed Loop Micromanipulators for Optical Metrology

L. Phong, J. Lee, I. Ressejac, M. Maszkiewicz, W. Zheng, S. Crisan, L. L. Noc, F. Picard, H. Jerominek
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Abstract

The use of light beam micromanipulators in space subsystems has received particular attention in recent years. To compensate for changes in system parameters during the flight, these devices require closed loop control. This paper reports on an integrated feedback mechanism devised for flexural tortional devices. It consists in using monolithically embedded photodetectors to measure the portion of incident light crossing an aperture created in the manipulator. The manipulator position is determined from the detector section shadowed by the displaced aperture. A model is presented for the electrostatically actuated manipulator, predicting effects of structural parameters on angular displacement and resolution. As proof of concept, photodiode assisted closed loop manipulators were microfabricated in varying configurations on Si wafer. Their characteristics of deflection versus actuation voltage were better than those predicted by the model. The feedback mechanism was validated in light of the good agreement between differential photocurrents measured from contiguous photodiodes and theoretical prediction. Details on device modeling, microfabrication, and characterization are reported.
用于光学计量的闭环微机械臂
近年来,在空间子系统中使用光束微操纵器受到了特别的关注。为了补偿飞行过程中系统参数的变化,这些装置需要闭环控制。本文报道了一种用于弯曲扭转装置的集成反馈机构。它包括使用单片嵌入式光电探测器来测量穿过机械手中创建的孔径的入射光的部分。机械手的位置由被位移孔径遮挡的检测器部分确定。建立了静电驱动机械手的模型,预测了结构参数对角位移和分辨率的影响。作为概念的证明,光电二极管辅助闭环机械手在硅片上以不同的构型进行了微加工。它们的偏转特性与驱动电压的关系比模型预测的要好。根据连续光电二极管测量的差分光电流与理论预测的良好一致性,验证了反馈机制。详细的器件建模,微加工和表征报告。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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