Electrically Tunable Silicon Microring Resonator with 589 pm/V Wavelength Tunability

Abstract

We demonstrated an electrically tunable silicon microring resonator integrated with high mobility titanium-doped indium oxide/hafnium oxide/silicon MOS capacitor. Narrowing the microring waveguide width to 300 nm achieved an extremely high electro-optic wavelength tunability of 589 pm/V with a high-quality factor of 5200.