A Nano-MOS Array: Metallic Carbon Nanostructure Connected with Nanoscale SiO2Islands inside Insulated Alumina Nanochannels on Silicon Substrate

2006 IEEE Conference on Emerging Technologies - Nanoelectronics Pub Date : 2006-03-27 DOI:10.1109/NANOEL.2006.1609760

Y. Mei, G. Siu, R. Fu, P. Chu, J. Zhai, Y.J. Wang, O. Tsui, Z. Tang, J.J. Shi, M. Kong

引用次数: 0

Abstract

A nano-MOS array consisting of metallic carbon nanostructures connected with nanoscale SiO2islands inside insulated alumina nanochannel on silicon substrate was fabricated via Si-based porous anodic alumina (PAA) template. The electrical properties of the nano-MOS array were studied by means of current-voltage (I-V) and frequency dependent capacitance-voltage (C-V) tests. This structure is important to the application of carbon nanostructures and PAA template and has high potential in future nanoelectronics applications.

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纳米mos阵列:金属碳纳米结构与硅衬底上绝缘氧化铝纳米通道内的纳米sio2岛连接

采用硅基多孔阳极氧化铝(PAA)模板，在硅衬底上制备了金属碳纳米结构与绝缘氧化铝纳米通道内纳米级sio2岛连接的纳米mos阵列。通过电流-电压(I-V)和频率相关电容-电压(C-V)测试研究了纳米mos阵列的电学性能。该结构对碳纳米结构和PAA模板的应用具有重要意义，在未来的纳米电子学应用中具有很大的潜力。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

2006 IEEE Conference on Emerging Technologies - Nanoelectronics

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