Low cost spinner developed for deposition of thin films used in OLED devices

E. R. Santos, Christine Miwa Takahashi, H. G. Takimoto, S. Yoshida, M. Oide, Elvo Calixto Burini Junior, R. Onmori, W. Hui
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引用次数: 2

Abstract

This work aims the development of a compact spinner to be used inside the glove-box chamber to deposition of polymeric thin films used in the build of OLED devices. Initially, ten fans extracted of microcomputers were tested with commercial multi-voltage power supply. Four fans were selected based on the standard deviation of speed. A variable power supply was also built in order to get a more detailed response in terms of electrical current and speed in function of applied voltage. The fan that showed less variation of speed with applied voltage was selected for deposition tests using polymeric photoresist solution on the ITO (indium tin oxide) coated glass. This polymer was deposited by spin-coating at different speeds: 1000, 2000, 3000 and 4000 rpm and dried for the thicknesses measurement revealing good uniformity. Finally, three OLED devices were assembled with 2000 and 3000 rpm and the layers were dried under the same conditions. In the structure of the devices were used the materials deposited layer-by-layer:glass/ITO/PEDOT:PSS/ Polyfluorene (PFpf)/Al. The OLED devices revealed blue light electroluminescence. The I-V curves showed better performance for OLED devices mounted at 2000 rpm with higher current density and similar appearance to the diode curve.
用于OLED器件中薄膜沉积的低成本旋转器
这项工作的目的是开发一种紧凑型旋转器,用于手套箱腔内沉积用于构建OLED器件的聚合物薄膜。首先,用商用多电压电源测试了10个从微型计算机中提取的风扇。根据转速的标准差选择4台风机。为了得到电流和速度随外加电压变化的更详细的响应,还设计了可变电源。采用聚合物光刻胶溶液在ITO(氧化铟锡)镀膜玻璃上进行沉积试验,选择速度随外加电压变化较小的风扇。以1000、2000、3000和4000转/分的不同转速沉积该聚合物,并进行干燥测厚,结果显示均匀性好。最后,分别在2000和3000 rpm的转速下组装3个OLED器件,并在相同的条件下进行干燥。在器件的结构中采用了逐层沉积的材料:玻璃/ITO/PEDOT:PSS/聚芴(PFpf)/Al。OLED器件显示出蓝光电致发光。在2000 rpm下安装的OLED器件具有更高的电流密度和与二极管曲线相似的外观,其I-V曲线表现出更好的性能。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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