Study and Analysis of MEMS Based Flowrate and Path Sensor System

Abstract

This paper investigates the zinc oxide put coverings on an integrated silicon-nitride coatings on a silicon-micromachined or Microelectromechanical (MEMS) built flow sensor is a fluid flow path and flow rate. The deflection of the flow sensor is directly related to the flow rate which is a continuous flow method. MEMS built cantilever structure sense built on the external strain of the beam with esteem to the mass movement. The new cantilever structure will impressively change the sensitivity. Here the cantilever beam such as paddle shape and rectangular are proposed by using various geometries and finite element analysis used for calculating the simulation results. According to the displacement and stress study and simulation effects are found later, the device is having appropriate physical strength and it will demonstrate useful to calculate and intelligence the fluid speed. The bend of the cantilever beam on both flow rate and the path of the cantilever beam compared to the way of the fluid flow. Therefore the proposed paddle shape cantilever model of simulation results peripheral device can be active to realize the fluid mechanism.