A miniaturized rotational precision positioning stage

Abstract

A miniaturized rotational precision positioning stage using the spring-mounted piezoelectric actuators is proposed in this paper. The positioning stage features micro/nano-meter order moving ability that is caused by piezoelectric (PZT) impact force, and continuous actuation ability with unlimited rotational displacement that is obtained by the integration of compression spring and PZT actuator. A one-DOF (degree-of-freedom) experimental setup consisting of two spring-mounted PZT actuators was configured to examine the motion characteristics of the positioning stage. The main experimental results were obtained as follows: the rotational step motion was recorded as 12times10-6 rad due to one single actuation by pulse driving waveform having an amplitude of 70 V, and the continuous rotational step motion was obtained with an average value of 12times10-6 rad due to 10 times of actuations. Furthermore, the motion behaviors were examined by varying the amplitude of applied voltage. The average step motions due to 10 times of actuations were recorded as 38times10-6 rad and 1.5times10-6 rad, respectively, when the corresponding actuating amplitudes were 100 V and 50 V. The proposed stage having precision rotational ability and self-moving ability was experimentally demonstrated.