{"title":"Four-terminal piezoresistive transducer: Theory and perspectives","authors":"A. Gridchin","doi":"10.1109/INTERNANO.2009.5335610","DOIUrl":null,"url":null,"abstract":"At present, two various schemes are using for pressure sensors. They are: piezoresistive Wheatstone bridge and Four-Terminal Sillicon Piezoresistive transducer (FTSP).","PeriodicalId":376370,"journal":{"name":"2009 International School and Seminar on Modern Problems of Nanoelectronics, Micro- and Nanosystem Technologies","volume":"63 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2009-11-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2009 International School and Seminar on Modern Problems of Nanoelectronics, Micro- and Nanosystem Technologies","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/INTERNANO.2009.5335610","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
At present, two various schemes are using for pressure sensors. They are: piezoresistive Wheatstone bridge and Four-Terminal Sillicon Piezoresistive transducer (FTSP).