Operation verification of tunable plasmonic color filter composed by metal-insulator-metal subwavelength grating and MEMS actuator

Abstract

In this study, we proposed tunable plasmonic color filter by means of gap expansion of an metal-insulator-metal (MIM) subwavelength grating by a MEMS actuator. The fabricated MIM tunable color filter suppresses light leakage by 40%pt compared to the conventional Al tunable filter, resulting in improvement of wavelength selectivity. We also succeeded in extending the grating period from 445 nm to 505 nm by applying 5 V to the actuator, and realized a 45-nm spectral shift.