Measurement of Plasma Parameters by Floating Probe Method Using Tone Burst Signal

Abstract

Langmuir probe method developed by Langmuir and Mott-Smith is generally used for plasma diagnosis. We have been studying the floating probe method to obtain the electron temperature from the change of the floating potential when an AC voltage is applied to the probe.1,2 This method was developed to improve the “probe contamination” and “plasma disturbance” problems of the classic Langmuir probe method.