{"title":"Self-Organizing Process Of Moderately Strained Zn/sub 1-x/CdxSe Layer Grown On GaAs","authors":"H. Ko, S. Fujita","doi":"10.1109/IMNC.1998.730016","DOIUrl":null,"url":null,"abstract":"Fabrication of semiconductor nanostructures such as quantum wires and quantum dots is very important for realization of new functional quantum devices. Among the various methods, a self-organization technique using the Stranski-Krastanow (S-K) growth mode in strained system has received great interest because high quality nano-scaled islands can be easily formed by epitaxial growth without any minute lithographic processes. However, since the spatial distributions of these islands are random, it is difficult to obtain a precise control of characteristics of the device. Several groups have attempted to control the islands to be linearly ordered. However, only irregular short-range arrays (less than 1 pm) were obtained [1,2].","PeriodicalId":356908,"journal":{"name":"Digest of Papers. Microprocesses and Nanotechnology'98. 198 International Microprocesses and Nanotechnology Conference (Cat. No.98EX135)","volume":"23 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1998-07-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Digest of Papers. Microprocesses and Nanotechnology'98. 198 International Microprocesses and Nanotechnology Conference (Cat. No.98EX135)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IMNC.1998.730016","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
Fabrication of semiconductor nanostructures such as quantum wires and quantum dots is very important for realization of new functional quantum devices. Among the various methods, a self-organization technique using the Stranski-Krastanow (S-K) growth mode in strained system has received great interest because high quality nano-scaled islands can be easily formed by epitaxial growth without any minute lithographic processes. However, since the spatial distributions of these islands are random, it is difficult to obtain a precise control of characteristics of the device. Several groups have attempted to control the islands to be linearly ordered. However, only irregular short-range arrays (less than 1 pm) were obtained [1,2].