Self-Organizing Process Of Moderately Strained Zn/sub 1-x/CdxSe Layer Grown On GaAs

H. Ko, S. Fujita
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引用次数: 0

Abstract

Fabrication of semiconductor nanostructures such as quantum wires and quantum dots is very important for realization of new functional quantum devices. Among the various methods, a self-organization technique using the Stranski-Krastanow (S-K) growth mode in strained system has received great interest because high quality nano-scaled islands can be easily formed by epitaxial growth without any minute lithographic processes. However, since the spatial distributions of these islands are random, it is difficult to obtain a precise control of characteristics of the device. Several groups have attempted to control the islands to be linearly ordered. However, only irregular short-range arrays (less than 1 pm) were obtained [1,2].
GaAs上生长中等应变Zn/sub - 1-x/CdxSe层的自组织过程
量子线和量子点等半导体纳米结构的制备对于实现新型功能量子器件非常重要。在各种方法中,在应变系统中使用Stranski-Krastanow (S-K)生长模式的自组织技术受到了极大的关注,因为高质量的纳米级岛可以通过外延生长轻松形成,而无需任何微小的光刻工艺。然而,由于这些孤岛的空间分布是随机的,很难获得对设备特性的精确控制。几个组织试图控制这些岛屿,使其线性有序。然而,仅获得不规则的短程阵列(小于1 pm)[1,2]。
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