C. Hagen, G.P.E.M. van Bakel, E. Borgonjen, P. Kruit, V. Kazmiruk, V. Kudryashov
{"title":"A novel low-voltage ballistic-electron-emission source","authors":"C. Hagen, G.P.E.M. van Bakel, E. Borgonjen, P. Kruit, V. Kazmiruk, V. Kudryashov","doi":"10.1109/IVMC.1996.601841","DOIUrl":null,"url":null,"abstract":"A novel tunnel junction emitter based on ballistic electron transmission through ultra-thin metal foils is proposed as an electron source. From a simple planar tunneling model and Monte-Carlo simulations, we show that either a high-brightness monochromatic electron source can be obtained or a high-current source with energy spread comparable with a field emission source. Freestanding 5 nm thick Pt films were successfully fabricated for the construction of a tunnel junction electron source, in which a UHV-STM is used as a tip-emitter positioning device.","PeriodicalId":384104,"journal":{"name":"9th International Vacuum Microelectronics Conference","volume":"103 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1996-07-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"9th International Vacuum Microelectronics Conference","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IVMC.1996.601841","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
A novel tunnel junction emitter based on ballistic electron transmission through ultra-thin metal foils is proposed as an electron source. From a simple planar tunneling model and Monte-Carlo simulations, we show that either a high-brightness monochromatic electron source can be obtained or a high-current source with energy spread comparable with a field emission source. Freestanding 5 nm thick Pt films were successfully fabricated for the construction of a tunnel junction electron source, in which a UHV-STM is used as a tip-emitter positioning device.