Design and Modeling of a Piezoelectric, Bistable Out-of-Plane Actuator for Micro-Robotic Appendages

M. Clad, Choong-Ho Rhee, K. Oldham
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Abstract

This paper explores the design and modeling of a bistable, piezoelectrically-actuated mechanism intended to produce out-of-plane rotation of micro-robotic appendages. The design is based on thin-film lead-zirconate-titanate (PZT) unimorph bending beams with mismatched lengths that connect a silicon appendage to a substrate or chassis. Device modeling focuses on the relative effects of internal piezoelectric bending moments versus residual stress from fabrication processes, across various candidate actuator dimensions. Analytical modeling indicates that beam arrays using the bistable design can improve on range-of-motion and stiffness of similarly-sized but linear bending beam arrays. Preliminary validation of the design is performed using a larger, centimeter-scale mock-up, while observations from prototype micro-scale fabrication are noted, along with implications for process control necessary to successfully implement the design in a terrestrial micro-robot.
微型机器人附件用压电双稳态面外驱动器的设计与建模
本文探讨了一种双稳态、压电驱动机构的设计和建模,旨在产生微机器人附属物的面外旋转。该设计基于薄膜铅锆钛酸盐(PZT)均匀弯曲梁,其长度不匹配,将硅附件连接到衬底或底盘。器件建模侧重于内部压电弯矩与制造过程中残余应力的相对影响,跨越各种候选致动器尺寸。分析模型表明,采用双稳态设计的梁阵可以提高同尺寸线性弯曲梁阵的运动范围和刚度。设计的初步验证使用更大的厘米尺度模型进行,同时注意到原型微尺度制造的观察结果,以及在地面微型机器人中成功实施设计所需的过程控制的含义。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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