Analysis of the thickness measurement of multilayer optical thin films with grazing incident x-ray

Abstract

The measuring conditions of the thickness of thin films with grazing incident x-ray is explained, and interferential principle and method to measure the thickness of thin films by grazing incident x-ray are discussed and analyzed in the paper. The periodic thickness of the multilayer optical thin films is measured with double-crystal diffractometer at a very small grazing incident angle, the result is satisfactory and measured values is in good agreement with designed values.