The impact of lead geometry and discrete doping on NWFET operation

S. Berrada, M. Bescond, N. Cavassilas, L. Raymond, M. Lannoo
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Abstract

This work investigates the influence of discrete dopant positions and lead geometry on the contact resistance in ultrascaled nanowire field effect transistors (NWFET). We use Green's function approach self-consistently coupled with Poissons equation to show that impurity levels play an important role in current transmission from the highly doped regions to the channel of realistic NWFETs. We find that the best ON-state current is obtained when the impurities are placed in the narrow regions close to channel entrance, and that the closer is the impurities to the Si/SiO2 interfaces the better is the ON-state current. This could be attributed to the dielectric confinement occuring in narrow nanowires. These results show that careful control of both shape and dopant positions is needed to optimize contact resistance and can be of a great interest to NWFET designers to boost the performance of the forthcoming device generations.
引线几何形状和离散掺杂对NWFET工作的影响
本文研究了离散掺杂位置和引线几何形状对超尺度纳米线场效应晶体管(NWFET)接触电阻的影响。我们使用格林函数方法自一致地耦合泊松方程来证明杂质水平在高掺杂区域到实际nwfet通道的电流传输中起重要作用。我们发现,当杂质放置在靠近通道入口的狭窄区域时,可以获得最佳的导通电流,并且杂质离Si/SiO2界面越近,导通电流越好。这可能归因于在窄纳米线中发生的介电约束。这些结果表明,需要仔细控制形状和掺杂剂的位置来优化接触电阻,并且NWFET设计人员对提高即将到来的器件性能非常感兴趣。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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