Mode shape measurement system with temperature variation function

Abstract

A measurement system with a temperature control function was developed for mapping the vibration patterns of piezoelectric resonator devices. This system is based on the laser speckle method with intermittent device excitation. By use of a small oven with transparent windows, the vibration shapes of devices can be visualized in high temperature environment. Experimental results using a 5.6 MHz AT-cut quartz resonator show that the mode shapes can be visualized from room temperature to 74°C