Modeling of XeCl excilamps with barrier discharge in frequency regime of work

Abstract

The results of modeling of XeCl excilamps with barrier discharge in frequency regime are considered. Model of XeCl excilamp taking into account process of Cl2 regeneration is developed. Excilamp efficiency can reach 4 % at use of small values of storage capacity and at that pulse energy is equal 0,032 J and power of radiation is 3200 W.