Surface conditions and electrical breakdown characteristics of ozonized water treated copper electrodes of a vacuum gap

Proceedings ISDEIV. 19th International Symposium on Discharges and Electrical Insulation in Vacuum (Cat. No.00CH37041) Pub Date : 2000-09-18 DOI:10.1109/DEIV.2000.877250

S. Kobayashi, K. Sekikawa, K. Asano, Y. Saito

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引用次数: 1

Abstract

Ozonized water treatment has the advantages that organic contaminants can be removed to produce a passivated oxidized film on the surface and the treated surface condition can be kept in air. This technique has been applied to the surface treatment of oxygen-free copper electrodes. Experimental results revealed that the breakdown field at the 1st application of voltage was not always improved, but a significant conditioning effect was obtained without any in-situ precautions. Moreover, additional in-situ sputter cleaning on the ozonized water treated surface improved the 1st breakdown field. Surface analysis clarified that after the ozonized water treatment, the electrode surface was covered with an oxidized film (CuO) and this film was removed to expose bulk copper after conditioning by 500 repetitive breakdowns caused by applying impulse voltages. These results can be attributed to the characteristic that the treated surface can be kept in air.

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臭氧水处理真空间隙铜电极的表面条件和电击穿特性

臭氧水处理的优点是可以去除有机污染物，在表面形成钝化氧化膜，并且处理后的表面状态可以保持在空气中。该技术已应用于无氧铜电极的表面处理。实验结果表明，首次施加电压时击穿场并不总是得到改善，但在不采取任何现场预防措施的情况下，获得了显著的调节效果。此外，在臭氧水处理表面进行额外的原位溅射清洗改善了第一次击穿场。表面分析表明，在臭氧水处理后，电极表面覆盖了一层氧化膜(CuO)，并在施加脉冲电压500次重复击穿后去除该膜以暴露大量铜。这些结果可归因于处理后的表面可以保持在空气中的特性。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Proceedings ISDEIV. 19th International Symposium on Discharges and Electrical Insulation in Vacuum (Cat. No.00CH37041)

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