Coarse grating precision displacement measuring system with opto-scanner

Abstract

A coarse grating precision displacement measuring system is described in the paper. The system consists of an opto-scanner used as a displacement sensor, a simple optical system, a large pitch reflecting coarse grating (X=0.635mm) and signal processing circuits etc. After describing the opto-scanner briefly, the paper expounds the principle of the system, the schematic circuits and the theory of dynamic phase discriminating and subdivision. Experiment results is satisfactory.