A sticking-free and high-quality factor MEMS variable capacitor with metal-insulator-metal dots as dielectric layer

Abstract

This paper describes a novel design of a MEMS variable capacitor with high operating reliability and high quality factor. Metal-Insulator-Metal (MIM) dots between a fixed electrode and a movable electrode in a variable capacitor is proposed. A Fabricated MEMS capacitor was operated one billion or more times without sticking. It demonstrated a high quality factor of 200 at 0.5 pF. It was experimentally confirmed that MIM dots effectively achieve a sticking-free and high-quality-factor MEMS variable capacitor.