Three-dimensional analysis of forced piezoelectric vibrations of rectangular AT-cut quartz plates and X-cut LiTaO/sub 3/ plates

Abstract

We have developed a method for analyzing 3D forced vibrations of rectangular piezoelectric plates. Since it utilizes only a 2D FEM, the matrix size required is much smaller than that required when using a 3D FEM. The 2D FEM was used to obtain a 2D forced solution satisfying the driving requirement and also to obtain a 3D free solution. The calculated capacitance characteristics of a rectangular AT-cut quartz plate agreed very well with measured data. We also showed a numerical example for a 3/spl deg/ rotated X-cut LiTaO/sub 3/ plate.